Lam Research Model 4520 200MM Oxide Etcher, CE Marked
| Start Price |
USD 136,175.00 |
| Current Price |
USD 136,175.00 |
| Time Left |
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| Bid Count |
0 |
| Buy It Now Price |
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| Reserve Price |
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| Start Time |
Friday, June 27, 2008 |
| End Time |
Monday, July 07, 2008 |
| Location |
Temple, TX |
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See more about 'Lam Research Model 4520 200MM Oxide Etcher, CE Marked'
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Description
Lam Research Model 4520, S/N 24232, 200MM, CE Marked, Very Clean System! Wafer Clamping, Backside Helium, Endpoint Detection. Ergonomic Cassette Load/Upload, Hine 38A Indexers, Upgraded wafer edge sensor, Orbital welded 8 process gas box with Tylan 2900 MFC's: CF4- 200 sccm, CF4- 50 sccm, CHF3- 200 sccm, N2- 100 sccm, AR- 500 sccm, N2- 100 sccm, AR- 500 sccm, CHF3- 200 sccm. Unit 1300 N2-50 sccm for backside cooling. Lofat tuning network. Includes remote RF Cart with AE PDW-2200, cables, Lam 2080 Dual Channel chiller, Classic Software. Pumps and process kit are not included. We'll ship Worldwide. Pickup only. It's hooked up and ready for inspection.
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